Investigation on ferroelectricity in Zr-doped HfO2 (HZO) based lamianated structure with TEMA-Hf and Cp-Zr

제목
Investigation on ferroelectricity in Zr-doped HfO2 (HZO) based lamianated structure with TEMA-Hf and Cp-Zr
저자
김상완
발행일
2023-07-10
학회명
ASIA-PACIFIC WORKSHOP ON ADVANCED SEMICONDUCTOR DEVICES (AWAD)