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Investigation on ferroelectricity in Zr-doped HfO2 (HZO) based lamianated structure with TEMA-Hf and Cp-Zr
- 제목
- Investigation on ferroelectricity in Zr-doped HfO2 (HZO) based lamianated structure with TEMA-Hf and Cp-Zr
- 저자
- 김상완
- 발행일
- 2023-07-10
- 학회명
- ASIA-PACIFIC WORKSHOP ON ADVANCED SEMICONDUCTOR DEVICES (AWAD)