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Back-end-of-line compatible metal-ferroelectric-insulator-silicon capacitor with Al2O3 insulator: ferroelectricity enhancement by ZrO2 seed layer
- 제목
- Back-end-of-line compatible metal-ferroelectric-insulator-silicon capacitor with Al2O3 insulator: ferroelectricity enhancement by ZrO2 seed layer
- 저자
- 김상완
- 발행일
- 2025-07-03
- 학회명
- ASIA-PACIFIC WORKSHOP ON ADVANCED SEMICONDUCTOR DEVICES (AWAD)