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Study about thermal stability in ferroelectric Hf0.5Zr0.5O2 film with Al2O3 layer
- 제목
- Study about thermal stability in ferroelectric Hf0.5Zr0.5O2 film with Al2O3 layer
- 저자
- 김상완
- 발행일
- 2023-07-11
- 학회명
- ASIA-PACIFIC WORKSHOP ON ADVANCED SEMICONDUCTOR DEVICES (AWAD)