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Investigation of oxygen-scavenging effect on Hf0.5Zr0.5O2 metal-ferroelectric-insulator semiconductor (MFIS) stack with CMOS compatible gate structure
- 제목
- Investigation of oxygen-scavenging effect on Hf0.5Zr0.5O2 metal-ferroelectric-insulator semiconductor (MFIS) stack with CMOS compatible gate structure
- 저자
- 김상완
- 발행일
- 2024-01-24
- 학회명
- 한국반도체학술대회