Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics

Min, Sung-Kyu; Moon, Bongjin; Kim, Hyunjung; Rhee, Hee-Woo

doi:10.1016/j.cap.2010.11.026

상세 보기

Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics

Min, Sung-Kyu;
Moon, Bongjin;
Kim, Hyunjung;
Rhee, Hee-Woo

Citations

WEB OF SCIENCE

3

Citations

SCOPUS

4

초록

We prepared ultralow dielectrics with remarkably high mechanical strengths (E similar to 8.1 GPa and H similar to 1.2 GPa). The reactivity of porogens was critical to enhanced mechanical properties of ULK. In the case of non-reactive porogens the mechanical properties of nanoporous ultralow dielectrics dramatically decreased with reduction in dielectric constant. However, reactive CD was very effective in the preparation of ULK for the next generation semiconductors. (C) 2010 Elsevier B. V. All rights reserved.

키워드

Nanoporous ultra-low dielectrics; Cyclodextrin-based reactive porogen; Mechanical properties; ORGANIC/INORGANIC HYBRID NANOCOMPOSITES; CHEMICALLY BONDED POROGENS; SPIN-ON GLASSES; MICROELECTRONIC APPLICATIONS; METHYLSILSESQUIOXANE; ORGANOSILICATES; FILMS

제목: Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics

저자: Min, Sung-Kyu; Moon, Bongjin; Kim, Hyunjung; Rhee, Hee-Woo

DOI: 10.1016/j.cap.2010.11.026

발행일: 2011-01

유형: Article; Proceedings Paper

저널명: Current Applied Physics

권: 11

호: 1

페이지: S313 ~ S318