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Microfabrication of 3-dimensional photoresist structures using selective patterning and development on two types of specific resists and its applicati
- 제목
- Microfabrication of 3-dimensional photoresist structures using selective patterning and development on two types of specific resists and its applicati
- 저자
- 윤광석
- 발행일
- 2004-01-01
- 학회명
- INTERNATIONAL MEMS CONFERENCE