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Fabrication of Silicon on Insulator (SOI) Nanowire Pattern using Nanoimprint Lithography for the Application to Bioelectronics
- 제목
- Fabrication of Silicon on Insulator (SOI) Nanowire Pattern using Nanoimprint Lithography for the Application to Bioelectronics
- 저자
- 오병근
- 발행일
- 2008-10-06
- 학회명
- 한국생물공학회 2008년도 추계 학술대회