Fabrication of Silicon on Insulator (SOI) Nanowire Pattern using Nanoimprint Lithography for the Application to Bioelectronics

제목
Fabrication of Silicon on Insulator (SOI) Nanowire Pattern using Nanoimprint Lithography for the Application to Bioelectronics
저자
오병근
발행일
2008-10-06
학회명
한국생물공학회 2008년도 추계 학술대회