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BEOL Compatible Hf0.5Zr0.5O2 Film Using ZrO2 Seed Layer

제목
BEOL Compatible Hf0.5Zr0.5O2 Film Using ZrO2 Seed Layer
저자
김시현
발행일
2025-01-20
학회명
INTERNATIONAL CONFERENCE ON ELECTRONICS, INFORMATION AND COMMUNICATIONS (ICEIC) 2025

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