Complementary neutron and X-ray reflectivity for structural characterization of porous thin films

  • Huang, Yu-Shan
  • Jeng, U-Ser
  • Hsu, Chia-Hung
  • Torikai, Naoya
  • Lee, Hsin-Yi
  • ... Shin, Kwanwoo
  • 외 1명
Citations

WEB OF SCIENCE

4
Citations

SCOPUS

5

초록

Neutron reflectivity (NR) and X-ray reflectivity (XR) have been measured for a silicon-gel-derived porous thin film, deposited on an oxide silicon wafer. The complementary NR and XR data provide a better determination of the film structure. With the two critical wavevectors for total reflection of neutrons and X-rays measured for the film, we have extracted the hydrogen content of the film. We have also discussed the strategy of using XR NR as a contrast to study the three-phase porous thin films. (c) 2006 Elsevier B.V. All rights reserved.

키워드

x-ray reflectivityneutron reflectivityporous thin filmcontrast variationSCATTERING
제목
Complementary neutron and X-ray reflectivity for structural characterization of porous thin films
저자
Huang, Yu-ShanJeng, U-SerHsu, Chia-HungTorikai, NaoyaLee, Hsin-YiShin, KwanwooHino, Masahiro
DOI
10.1016/j.physb.2006.06.122
발행일
2006-11-15
유형
Article; Proceedings Paper
저널명
Physica B: Condensed Matter
385
페이지
667 ~ 669