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Complementary neutron and X-ray reflectivity for structural characterization of porous thin films
- Huang, Yu-Shan;
- Jeng, U-Ser;
- Hsu, Chia-Hung;
- Torikai, Naoya;
- Lee, Hsin-Yi;
- ... Shin, Kwanwoo;
- 외 1명
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WEB OF SCIENCE
4Citations
SCOPUS
5초록
Neutron reflectivity (NR) and X-ray reflectivity (XR) have been measured for a silicon-gel-derived porous thin film, deposited on an oxide silicon wafer. The complementary NR and XR data provide a better determination of the film structure. With the two critical wavevectors for total reflection of neutrons and X-rays measured for the film, we have extracted the hydrogen content of the film. We have also discussed the strategy of using XR NR as a contrast to study the three-phase porous thin films. (c) 2006 Elsevier B.V. All rights reserved.
키워드
x-ray reflectivity; neutron reflectivity; porous thin film; contrast variation; SCATTERING
- 제목
- Complementary neutron and X-ray reflectivity for structural characterization of porous thin films
- 저자
- Huang, Yu-Shan; Jeng, U-Ser; Hsu, Chia-Hung; Torikai, Naoya; Lee, Hsin-Yi; Shin, Kwanwoo; Hino, Masahiro
- 발행일
- 2006-11-15
- 유형
- Article; Proceedings Paper
- 권
- 385
- 페이지
- 667 ~ 669