An array of Au nanoparticles on the nanopatterned Si(100)

  • Kang, SK
  • Kim, Y
  • Choi, I
  • Lee, J
  • Yi, JH
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초록

1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(110) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width. (c) 2005 Elsevier B.V. All rights reserved.

키워드

goldanodic oxidationarraynanopatterningGOLD NANORODSASPECT-RATIOABSORPTION-SPECTRASURFACES
제목
An array of Au nanoparticles on the nanopatterned Si(100)
저자
Kang, SKKim, YChoi, ILee, JYi, JH
DOI
10.1016/j.mee.2005.03.038
발행일
2005-08
유형
Article; Proceedings Paper
저널명
Microelectronic Engineering
81
2-4
페이지
389 ~ 393