Fabrication of Silicon Nanowire Pattern Using Nanoimprint Lithography as a Platform of Nanobiochip

제목
Fabrication of Silicon Nanowire Pattern Using Nanoimprint Lithography as a Platform of Nanobiochip
저자
오병근
발행일
2009-04-09
학회명
2009 한국생물공학회 춘계학술발표대회 및 국제심포지움