Gate Engineering Effect in Ferroelectric Field-Effect Transistors with Al-Doped HfO2 Thin Film and Amorphous Indium-Gallium-Zinc-Oxide Channel

초록

This work investigates the mechanism for the memory window (MW) suppression of the ferroelectric-thin film transistors (FETFTs) with an amorphous indium-gallium-zinc (a-IGZO) channel. a-IGZO generally has an n-type character with a high bandgap (>3 eV) and a high density of gap states, hindering the carrier type inversion. Therefore, the negative ferroelectric (FE) bound charges at the FE layer/a-IGZO interface must be compensated by the positive charges of the oxygen vacancy in the a-IGZO layer. In contrast, accumulated electrons can compensate for the positive FE-bound charges. Such a bound charge compensation mechanism complicates the FETFT operation and precise understanding. Experiments and simulations confirm that feasible FE switching in the bottom-TiN or P++-Si/Al-doped HfO2/a-IGZO/top-TiN structure can occur only when the countercharges in the a-IGZO layer compensate the positive and negative bound charges. More importantly, the Al-doped HfO2/a-IGZO interface generally involves electron trapping, which hinders FE switching and achieving a MW for the TiN gate case. When replacing the TiN gate with the P++-Si gate, the suppressed FE polarization by the depolarization effect from the SiO2 interface layer can mitigate electron accumulation. Consequently, the P++-Si bottom electrode (BE) is more advantageous than the TiN BE regarding a MW of FETFT.

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