Effects of Tip Voltage, Deflection Setpoint, Tip Velocity in Scanning Probe Microscope Induced Local Anodization on Si surface

제목
Effects of Tip Voltage, Deflection Setpoint, Tip Velocity in Scanning Probe Microscope Induced Local Anodization on Si surface
저자
신운섭
발행일
2007-09-12
학회명
58TH ANNUAL MEETING OF THE INTERNATIONAL SOCIETY OF ELECTROCHEMISTRY