Optimization of Poly-Si JLFET Based on TCAD Simulation for BEOL-Compatible V-FeMFET

제목
Optimization of Poly-Si JLFET Based on TCAD Simulation for BEOL-Compatible V-FeMFET
저자
김시현
발행일
2025-02-12
학회명
THE 32ND KOREAN CONFERENCE ON SEMICONDUCTORS (KCS)