Fabrication and evaluation of a flexible temperature sensor array using multi-layer ceramic capacitors for spatial temperature mapping

초록

This paper presents the development of a flexible temperature sensor array using multi-layer ceramic capacitors. By integrating the capacitors into a 5 × 5 array on a polydimethylsiloxane (PDMS) substrate, we exploit the principle of changing dielectric constant with temperature, which results in a change in capacitance. Our sensor array demonstrates a consistent decrease in capacitance with increasing temperature, with a sensitivity ranging from 1.42 to 1.62 pF/°C. This sensitivity range is maintained even when measurements are taken using a capacitance-to-voltage conversion circuit, with a sensitivity of 1.1 to 1.5 mV/°C. The repeatability and hysteresis of the sensors were also investigated, with the latter revealing a maximum error of 12.7%. Our findings provide valuable insights for the development of efficient, flexible, and reliable temperature sensor arrays using ceramic capacitors. © 2023, The Society of Micro and Nano Systems.

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