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Dark current reduction in APD with BCB passivation
- Kim, HS;
- Choi, JH;
- Bang, HM;
- Jee, Y;
- Yun, SW;
- ... Burm, J;
- 외 2명
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37초록
Mesa-structure SL-APDs were fabricated using three different passivation materials. benzocyclobutene (BCB). polyimide and SiNv. The best dark current was from BCB passivated devices with a mesa-diameter or 30 mum was 38nA when operated. approximately a factor of 10 improvement compared with other reports.
키워드
SUPERLATTICE AVALANCHE PHOTODIODES; PERFORMANCE
- 제목
- Dark current reduction in APD with BCB passivation
- 저자
- Kim, HS; Choi, JH; Bang, HM; Jee, Y; Yun, SW; Burm, J; Kim, MD; Choo, AG
- 발행일
- 2001-03-29
- 유형
- Article
- 권
- 37
- 호
- 7
- 페이지
- 455 ~ 457