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미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구
A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet
- 서영호;
- 손기헌
초록
Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.
키워드
Microdroplet Ejection(미세액적분사); Thin-Film Patterning Process(박막 패터닝 공법); Level-Set Method(Level set 방법); Self-Alignment Technique(자기정렬기법)
- 제목
- 미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구
- 제목 (타언어)
- A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet
- 저자
- 서영호; 손기헌
- 발행일
- 2009-01
- 저널명
- 대한기계학회논문집 B
- 권
- 33
- 호
- 1
- 페이지
- 28 ~ 37