미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구

A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet

초록

Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.

키워드

Microdroplet Ejection(미세액적분사)Thin-Film Patterning Process(박막 패터닝 공법)Level-Set Method(Level set 방법)Self-Alignment Technique(자기정렬기법)
제목
미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구
제목 (타언어)
A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet
저자
서영호손기헌
발행일
2009-01
저널명
대한기계학회논문집 B
33
1
페이지
28 ~ 37