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Effects of Hydrogen Plasma Power and Time on Crystallization and Microstructure of Low-Temperature PEALD In₂O₃ Thin Films
- 제목
- Effects of Hydrogen Plasma Power and Time on Crystallization and Microstructure of Low-Temperature PEALD In₂O₃ Thin Films
- 저자
- 김현정
- 발행일
- 2025-12-08
- 학회명
- ICAMD 2025
- 개최국가
- 대한민국