바이오 멤스 및 마이크로 시스템 적용을 위한3차원 마이크로 유로 제작

초록

This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed usingthre-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificialVarious shapes of photoresist structures were sucesfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS.In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMSalignment.

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