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초록
We observed the surface resistance of metal thin films by a nondestructive characterization method using a near-field scanning microwave microprobe (NSMM). The NSMM system was coupled to a dielectric resonator with a distance regulation system. To demonstrate the ability of local microwave characterization, the surface resistance dependence of the metallic thin films has been mapped nonclestructively.
키워드
near-field; surface resistance; non-contact; non-destructive; near-field scanning microwave microscope; RESONATOR; PROBE
- 제목
- Nondestructive and non-contact characterization technique for metal thin films using a near-field microwave microprobe
- 저자
- Yoo, Hyunjun; Kim, Jongchel; Babajanyan, Arsen; Kim, Songhui; Lee, Kiejin
- 발행일
- 2006
- 유형
- Article; Proceedings Paper
- 권
- 321-323
- 페이지
- 1457 ~ 1460