Detecting Defects in Sub-Skin-Depth Metallic Layers by a Thermo-Elastic Sensor

초록

The visualization of the microwave radiation intensity in the middle-field region by the thermo-elastic optical indicator microscopy (TEOIM) system for the sub-skin-depth metallic layers was performed. An indicator with the 10 nm Al deposition for the 50 GHz microwave radiation intensity visualization was used. Modeled simulation results were in good agreement with the experimental data. A defect discovering technique of the sub-skin-depth conductive layers was proposed. For the 20 nm Al indicator the scratched defect by the TEOIM visualization was successfully discovered. The relation of the Al layer thickness and its skin-depth was around 1:18.

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