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New Fabrication Technology for 3-D Photoresist Structures and Its Application to Microfluidic Components
- 제목
- New Fabrication Technology for 3-D Photoresist Structures and Its Application to Microfluidic Components
- 저자
- 윤광석
- 발행일
- 2004-02-01
- 학회명
- 제 11회 한국반도체학술대회