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Back-End-of-Line Compatible Metal-Ferroelectric-Insulator-Silicon Capacitor with Al2O3 Insulator: Ferroelectricity Enhancement by ZrO2 Seed Layer
- 제목
- Back-End-of-Line Compatible Metal-Ferroelectric-Insulator-Silicon Capacitor with Al2O3 Insulator: Ferroelectricity Enhancement by ZrO2 Seed Layer
- 저자
- 김시현
- 발행일
- 2025-07-03
- 학회명
- 2025 ASIA-PACIFIC WORKSHOP ON ADVANCED SEMICONDUCTOR DEVICES (AWAD)