Design and Synthesis of Bottle-Brush Type Block Copolymer for Large Domain Size Block Copolymer Lithography

제목
Design and Synthesis of Bottle-Brush Type Block Copolymer for Large Domain Size Block Copolymer Lithography
저자
문봉진
발행일
2015-04-03
학회명
4TH CONFERENCE OF THE NEXT GENERATION LITHOGRAPHY 2015