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Design and Synthesis of Bottle-Brush Type Block Copolymer for Large Domain Size Block Copolymer Lithography
- 제목
- Design and Synthesis of Bottle-Brush Type Block Copolymer for Large Domain Size Block Copolymer Lithography
- 저자
- 문봉진
- 발행일
- 2015-04-03
- 학회명
- 4TH CONFERENCE OF THE NEXT GENERATION LITHOGRAPHY 2015