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Effect of sputtering parameters on ferroelectricity in hafnium-zirconium oxide thin film capacitors
- 제목
- Effect of sputtering parameters on ferroelectricity in hafnium-zirconium oxide thin film capacitors
- 저자
- 양상모
- 발행일
- 2022-08-24
- 학회명
- THE 15TH ASIA PACIFIC PHYSICS CONFERENCE (APPC)