Tunable resonance cavity control in a near-field scanning microwave microscope

초록

We report a microwave surface imaging technique using a near-field scanning microwave microscope with a tunable resonance cavity. By tuning the resonance cavity, we could demonstrate improved sensitivity and spatial resolution of the near-field image of YBa2Cu3Oy thin films on MgO substrates. By measuring the shift in the resonant frequency and the change in the quality factor. we obtained near-field scanning microwave images with a spatial resolution better than 4 mum at an operating frequency of f=1-1.5 GHz. The principal of operation can be explained by using the perturbation theory of a coaxial resonant cavity, considering the radius of the probe tip and the sample-tip distance.

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