Improving Low-Temperature Ferroelectricity by Suppressing Bottom TiO2 Formation with SiO2 Capping Layer

제목
Improving Low-Temperature Ferroelectricity by Suppressing Bottom TiO2 Formation with SiO2 Capping Layer
저자
김시현
발행일
2026-01-28
학회명
THE 33ND KOREAN CONFERENCE ON SEMICONDUCTORS (KCS)