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The Fabrication of Line Shaped Embossing Structure by Holographic Lithography and its application to Electronic Device
- 제목
- The Fabrication of Line Shaped Embossing Structure by Holographic Lithography and its application to Electronic Device
- 저자
- 오병근
- 발행일
- 2007-11-08
- 학회명
- 2007 INTERNATIONAL CONFERENCE ON NANO SCIENCE AND NANO TECHNOLOGY