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X-ray Scattering Studies on Ultralow-k Nanoporous Organosilicate Dielectric Films as a Function of Porogen Loading
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- X-ray Scattering Studies on Ultralow-k Nanoporous Organosilicate Dielectric Films as a Function of Porogen Loading
- 저자
- 김현정
- 발행일
- 2007-10-18
- 학회명
- 한국물리학회