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Surface measurement of microstructures using optical pick-up based scanner
- Kim, Jae-Hyun;
- Park, Jung-Yul;
- Lee, Seung-Yop
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- Surface measurement of microstructures using optical pick-up based scanner
- 저자
- Kim, Jae-Hyun; Park, Jung-Yul; Lee, Seung-Yop
- 발행일
- 2010
- 유형
- Article
- 저널명
- 대한기계학회논문집 B
- 권
- 34
- 호
- 1
- 페이지
- 73 ~ 76