Analysis of interface trap density in metal-ferroelectric-insulator-semiconductor (MFIS) capacitor with high-k dielectrics

제목
Analysis of interface trap density in metal-ferroelectric-insulator-semiconductor (MFIS) capacitor with high-k dielectrics
저자
김시현
발행일
2024-01-25
학회명
제 31회 한국반도체학술대회