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A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars
- 제목
- A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars
- 저자
- 윤광석
- 발행일
- 2002-01-01
- 학회명
- IEEE INTERNATIONAL MEMS CONFERENCE